本規(guī)范共分14章和2個(gè)附錄,主要內(nèi)容包括總則,術(shù)語(yǔ),基本規(guī)定,工藝,廠址選擇及總體規(guī)劃,建筑,結(jié)構(gòu),氣體動(dòng)力,供暖、通風(fēng)、空氣調(diào)節(jié)與凈化,給水排水,電氣,防靜電,化學(xué)品,空間管理等。

GB51136-2015······1

1 總則······13

2 術(shù)語(yǔ)······14

3 基本規(guī)定······16

4 工藝······17

4.1 一般規(guī)定······17

4.2 基本工序······17

4.3 工藝區(qū)劃······17

4.4 設(shè)備配置······18

5 廠址選擇及總體規(guī)劃······20

5.1 廠址選擇······20

5.2 總體規(guī)劃······20

6 建筑······22

6.1 一般規(guī)定······22

6.2 防火及安全疏散······22

7 結(jié)構(gòu)······25

7.1 一般規(guī)定······25

7.2 廠房結(jié)構(gòu)設(shè)計(jì)······25

7.3 微振動(dòng)控制標(biāo)準(zhǔn)······26

7.4 微振動(dòng)控制設(shè)計(jì)及測(cè)試······27

7.5 基座平臺(tái)設(shè)計(jì)······27

8 氣體動(dòng)力······29

8.1 冷、熱源······29

8.2 大宗氣體供應(yīng)······30

8.3 特種氣體供應(yīng)······31

8.4 壓縮空氣供應(yīng)······33

8.5 工藝真空和清掃真空······34

9 供暖、通風(fēng)、空氣調(diào)節(jié)與凈化······35

9.1 一般規(guī)定······35

9.2 采暖、通風(fēng)與廢氣處理······35

9.3 空氣調(diào)節(jié)與凈化······38

9.4 防排煙······40

10 給水排水······41

10.1 一般規(guī)定······41

10.2 一般給水排水······41

10.3 純水······42

10.4 工藝?yán)鋮s循環(huán)水······42

10.5 廢水······43

10.6 消防給水及滅火設(shè)施······43

11 電氣······45

11.1 供配電與照明······45

11.2 防雷與接地······46

11.3 火災(zāi)報(bào)警及消防聯(lián)動(dòng)······46

11.4 通信及自控······48

12 防靜電······49

12.1 一般規(guī)定······49

12.2 防靜電措施······50

12.3 防靜電接地······51

13 化學(xué)品······53

13.1 一般規(guī)定······53

13.2 化學(xué)品儲(chǔ)存和配送······53

13.3 管材、閥門······56

13.4 化學(xué)品廢液收集團(tuán)收······56

14 空間管理······58

14.1 一般規(guī)定······58

14.2 管線布置······59

14.3 共用管道支、吊架······60

附錄A 薄膜晶體管液晶顯示器生產(chǎn)工藝流程······61

附錄B 微振動(dòng)標(biāo)準(zhǔn)VC曲線······63

本規(guī)范用詞說明······65

引用標(biāo)準(zhǔn)名錄······66

附: 條文說明······68